ステンレス鋼の放出ガス速度の低減--ベ-キング温度,履歴の効果

概要

論文の詳細を見る
Reduction of outgassing from stainless steels by baking is examined as a function of baking temperature and previous baking history. The effect of baking and prebaking temperature and subsequent air exposure on the outgassing reduction is discussed in terms of the changes in the surface compositions determined by Auger electron spectroscopy and in the desorption characteristics of adsorbed gases by thermal desorption spectra.<BR>The significance of the surface change in the outgassing reduction is pointed out. The surface compositional changes cannot fully explain the ougassing reduction and the changes in the structure and thickness of the surface oxide layer must be taken into account. This surface oxide layer is suggested to play a critical role in determining the desorption characteristics of adsorbed gases from the surface.<BR>This surface oxide layer also contributes to the outgassing reduction during the repeated air exposure/baking cycles. Full characterization of the surface oxide layer may result in more effective process of outgassing reduction leading to the establishment of extreme high vacuum technique.
日本真空協会の論文