微粉末を用いた泳動電着法によるBa1-xSrxTiO3誘電膜の作製と誘電特性の評価

概要

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Recently, Ba1−xSrxTiO3, with a perovskite structure, has drawn much attention as a dielectric material. For this study, we prepared Ba0.7Sr0.3TiO3 films using electrophoretic deposition with Ba0.7Sr0.3TiO3 fine particles of various sizes. For the film-forming process, we optimized the deposition voltage, deposition time, sample concentration, I2 concentration, and other parameters. Results show that the film thickness is controllable by changing the deposition time and voltage, although higher voltage made the film inhomogeneous. A film prepared with larger particles seemed to have lower density, but the density was improved using heat treatment at higher temperatures. Investigation of dielectric properties of the films revealed that a Ba0.7Sr0.3TiO3 film deposited in 0.5 g·L−1 I2-added acetone for 8 s at 50 V with a particle size of 0.3 μm and then heat-treated at 900 °C for 30 min had 2.52 μm thickness. It exhibited capacitance density of 113.9 nF·cm−2.