Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma
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概要
- 論文の詳細を見る
Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be - 100 nm. The particles seemed to be coagulated from several finer particles of size - 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra.
- Elsevierの論文
- 2000-10-17
著者
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Suda Y
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Suda Y
Graduate School Of Engineering Hokkaido University
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Suda Y
Faculty Of Technology Tokyo University Of Agriculture And Technology
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