E-60 クリーンルーム構成部材からのアウトガス測定法の検討

概要

論文の詳細を見る
We have developed new outgas sampling method of measuring volatile organic compounds from the surface of cleanroom construction materials. The sampling system consists of a double cylinder chamber containing activated carbon and outgas trapping tubes. The double cylinder chamber was put on the sampling surface, and outgas was collected in the 1st trapping tube for high adsorbed gas and the 2nd trapping tube for weak adsorbed gas. Here, the cleanroom air purified by the activated carbon was used as the carrier gas of outgas. Comparing this outgas sampling method with the conventional test-piece sampling method, we made sure the correspondence of detected outgas data. We also established the database for volatile organic compound from cleanroom materials.
社団法人空気調和・衛生工学会の論文
2005-07-25