S042041 FIB-CVD法によるDLC微小構造体の作製とその物性([S04204]セラミックスおよびセラミックス系複合材料(4))

概要

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A focused ion-beam assisted chemical vapor deposition (FIB-CVD) method has attracted much attention as a fabrication technique of three-dimensional structures with complex shapes in micro-/nanometer scale. With this process, diamond-like carbon (DLC) can be fabricated when phenanthrene (C_14H_10) gas is used as source material. However, the properties of DLC fabricated by the FIB-CVD method have not been investigated extensively. In this study, the mechanical properties and microstructures of DLC have been investigated in terms of the relation to the processing parameters. It was found that the hardness of DLC decreased from 14 to 8GPa. The trend of hardness decrease was well correlated with the ratio of the etching rate to the deposition one. In addition, the DLC hardness increased with decreasing the hydrogen concentration and increasing the ratio of sp^3 bonding. Through these experiments, it was suggested that the ion beam conditions, including not only deposition condition but etching one, have significant influence on hydrogen concentration and carbon bonding in DLC, which resulted in the change in mechanical properties of the DLC fabricated by the FIB-CVD method.
一般社団法人日本機械学会の論文
2011-09-11