5-3 ナノピラーの変形機構におけるサイズ効果(セッション5:OS1-2 マルチスケール・シミュレーションとナノ計測)

概要

論文の詳細を見る
Nanopillars fabricated by chemical vapor deposition using a focused-ion-beam are provided for estimations of bending rigidities under infinitesimal deformation and for investigations of nonlinear large deformation behaviors. For the pillars, we performed the unique bending tests using a double cantilever specimen, which is made by joining two pillars together by focused electron beam deposition in scanning electron microscope. The highly reliable load-deflection curves tell us that the pillars yield the decrease of deformation resistance after linear response (called softening), being dependent on pillar diameter itself and the ratio of diameter to length. However, any pillar finally becomes extremely hardened at the large deformation. Within the scale less than diameter of about 300nm and more than diameter/length ratio of roughly 10^<-2>, this size effect of nanopillars characterized as softening can always be observed.
一般社団法人日本機械学会の論文
2011-09-25