441 FIB-CVD法によるDLC微小構造体の作製条件と機械的特性の関係(複合機能化材料・デバイスとその加工プロセス)

概要

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Relationship between processing conditions and mechanical properties of diamond-like carbon (DLC) micrometer-order structures by focused ion-beam chemical vapor deposition (FIB-CVD) method was investigated. DLC micro-structures were produced with various supplied amount of material gas and probe current of FIB. To evaluation of the mechanical properties, hardness and Young's modulus were obtained by a nano-indentation tester. Experimental results indicated that a deposition rate was increased with increasing both the amount of gas and the probe current. From evaluation of the mechanical properties, it was found that hardness and Young's modulus were sensitive to the processing condition, showing in the range of 8-14 GPa and 110-160 GPa, respectively. Hardness of DLC was seemed to be lower when etching process higher contributed for formation process. There was no definite correlation between Young's modulus and contribution of etching process.
一般社団法人日本機械学会の論文
2009-11-06