2A1-J04 パラレルメカニズムを用いた座標計測用倣いプローブに関する研究 : リンク機構の設計と機構キャリブレーション(パラレルロボット・メカニズム)

概要

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A 3-dof active scanning probe using a translational parallel mechanism (TPM) is proposed. In this paper, the characteristics of the mechanism, optimum design, and accuracy of the TPM are introduced. An optimum TPM design is proposed as the manipulability of the mechanism is equal in all directions. This implies that the force and position sensitivities of the TPM share an isotropic relationship. The working range and the positional resolution of the mechanism are designed as +/-0.8mm cubic volume and 1μm, respectively. An experimental mechanism using the proposed design is introduced. In order to evaluate the accuracy of the TPM, we developed an experimental system for the measurement of the position of the TPM by using image processing. By applying mechanical calibration, the accuracy of the absolute position of the TPM has become 3.4μm.
一般社団法人日本機械学会の論文
2011-05-26