MNM-1B-5 屈折率が不均一な走行面上の超微小すきまスライダの動的挙動 : モデル解析と実験値に基づく解析(セッション 1B 情報・精密機器におけるマイクロ・ナノテクノロジー1)

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Recording media with grooves such as discrete track media (DTM) and bit-patterned media (BPM), are considered to be some of the most promising media for achieving ultrahigh track densities. Thus, it is becoming increasingly important to analyze the static and dynamic characteristics of flying head sliders over DTM/BPM media using the van der Waals (vdW) force equation and the molecular gas-film lubrication (MGL) equation. In this paper, we expanded the refractive index distribution in the running direction obtained by ellipsometric measurement to Fourier series, and calculated the static slider attitude, and then obtained the dynamic responses in frequency domain using the perturbation method. Especially, we dealt with a model for the periodical refractive index distribution with a step-like profile (zebra model) and experimental result According to the method, the dynamic characteristics such as spacing fluctuations were quantitatively obtained.
2010-10-12