2A1-N04 Au/poly-Siバイモルフ構造を用いた低電圧静電マイクロポンプの駆動特性評価(ナノ・マイクロ流体システム)

概要

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This paper presents the dynamic characteristics of an electrostatic micropump with Au/poly-Si bimorph structure. Its performance is achieved by using several cantilevers connected in series and bending them repeatedly with electrostatic force. The fabricated micropump was tested by applying voltages with various frequencies and amplitudes, and its deflections were measured using a laser displacement meter and a CCD camera. The micropump could be driven in a low-conductive liquid such as silicone oil, and the relationship between applied voltage and cantilever deflection had large hysteresis. The maximum deflection of the micropump in the silicone oil was obtained at a frequency of up to 15 Hz, and was decreased when frequency was increased to more than 15 Hz.
一般社団法人日本機械学会の論文
2007-05-11