1P1-C18 2自由度静電マイクロアクチュエータのための水平方向大変形の実現

概要

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This paper presents a vertically structured electrostatic microactuator with large horizontal deflection. Its horizontal performance will be achieved by using several cantilevers connected in series and by bending them sequentially with electrostatic force. The vertical structure was realized by using two curved beams measuring 1650 μm made of Au/poly-Si bimorph structure with 1.0 μm thick poly-Si and 0.5 μm thick Au films. The fabricated microactuator was tested by applying DC voltage, and its actuation was observed using a CCD camera. Contrary to our expectation, however, no horizontal deflection was observed, while two curved beams for the vertical structure were unintentionally bent due to heat generation because they were not insulated enough from each other by SiN.
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