Au/poly-Siバイモルフ構造を用いた静電マイクロアクチュエータの駆動特性の改善(J21-2 静電アクチュエータ・MEMS技術応用,J21 マイクロメカトロニクス)

概要

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An electrostatic microactuator with Au/poly-Si bimorph structure was driven with low voltage of 5.2 V, and it was vibrated repeatedly with amplitude of 10μm and frequency of 160 Hz. Its performance is achieved by using several cantilevers connected in series and bending them repeatedly with electrostatic force. The fabricated microactuators were tested by applying voltages with various frequencies and amplitudes, and its deflections were measured using a laser displacement meter. As a result, the deflection of an actuator was found to be the maximum at a frequency of up to 160 Hz when the actuator size was 300μm. The hysteresis of characteristics of the fabricated microactuator became smaller when the actuator size was decreased. Also, the frequency band where the maximum deflection was obtained became wider with reduction of the actuator size.
一般社団法人日本機械学会の論文
2004-09-04