OPT-04 HIGH RESOLUTION SOLID IMMERSION LENS-BASED NEAR-FIELD OPTICS WITH AN ANNULAR APERTURE(Optical Storage/Optical Devices for Storage II,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
In novel cover-layer-protected solid immersion lens (SIL)-based near-field recording (NFR) optics, we presented superior optical performance by modulating the amplitude and phase in the entrance pupil using annular pupil zones. Using an annular aperture consisting of three concentric annular zones, the 1.45 numerical aperture (NA) cover-layer-protected SIL-based NFR optics achieved improvement of optical resolution. These 1.45 NA optics yielded a full width at half maximum (FWHM) spot size of 0.315λ, a focal depth of 0.82λ, a focused beam spot sensitivity to air-gap distance within the near-field region of 0.04λ, and a sidelobe intensity lower than 7%. In comparison with 1.80 NA, the annular aperture optics achieved 3.5 times longer focal depth and much lower focused beam spot sensitivity to air-gap distance while maintaining the same high resolution.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Park No-cheol
Department Of Mechanical Engineering Yonsei University
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Park No
Center For Information Storage Device Yonsei University
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Park No-cheol
Center For Information Storage Device Yonsei University
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PARK Young-Pil
Department of Mechanical Engineering, Yonsei University
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YOON Yong-Joong
Center for Information Storage Device, Yonsei University
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Park Kyoung-Su
Department of Mechanical Engineering, Yonsei Univ.
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Park No-cheol
Center For Information Storage Devices Yonsei University
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Park Young-pil
Department Of Mechanical Engineering Yonsei University
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Park Young
Center For Information Storage Device Yonsei University
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Park Young-pil
Center For Information Storage Devices Yonsei University
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Kim Wan-chin
Center For Information Storage Device Yonsei University
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Moon Hyungbae
Center for Information Storage Device, Yonsei University
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Moon Hyungbae
Center For Information Storage Device Yonsei University
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Park Kyoung-Su
Center for Information Storage Device (CISD), Yonsei University
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Park Kyoung-su
Center For Information Storage Device (cisd) Yonsei University
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Yoon Yong-joong
Center For Information Storage Device Yonsei University
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Park No-Cheol
Department of Mechanical Engineering, Yonsei University
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Kim Wan-Chin
Center for Information Storage Device (CISD), Yonsei University, 134 Shinchon-Dong, Seodaemoon-Ku, Seoul 120-749, Korea
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Park Kyoung-Su
Department of Mechanical Engineering, YERC#332, Yonsei University, 262 Seongsanno, Seodaemun-gu, Seoul 120-749, Korea
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