3811 斜め入射光学系を用いたHDDスライダ浮上量の高精度測定技術に関する検討(S54 情報機器コンピュータメカニクス,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Finding a method of accurately measuring ultra-low flying heights (FH) of an HDD slider is becoming more and more important. We have developed a way of using a specular optical system to measure the FH to a high level of accuracy. While the basic method is to measure the height of a slider flying over a bare glass disk, this method can also be used to measure one flying over a glass disk with a overcoat (OC) and a lubricant agent (Lube) and thus to observe the touch down (TD) or the take off (TO) behavior. We theoretically investigated the effect of the OC and the Lube layer on the accuracy of the measurement and a method to compensate for their effect.
2008-08-02