1P5-11 結晶粒界による薄膜SAW 速度と損失の変化(ポスターセッション)

概要

論文の詳細を見る
High frequency communication devices including thin film surface acoustic wave (SAW) filter, film bulk acoustic resonator (FBAR), as well as microelectromechanical systems (MEMS) use piezoelectric thin films (PZT, LiNbO_3, AlN, ZnO) as actuating elements. However, sound velocity of polycrystalline piezoelectric films is sometimes different from that calculated using published single-crystal elastic constants. There is reason to believe that that was caused by grain boundaries. In this work, elastic constants of thin films were calculated by using a composite model. In addition, because complex elastic constants were introduced in the calculation, propagation loss was evaluated, and a good result was obtained.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2008-11-11