3605 LIGAプロセスを用いた微細形状パターン射出成形品の開発(4)(S60 超精密・微細加工,S60 超精密・微細加工)

概要

論文の詳細を見る
For an injection molded plastic micro device with microstructures on the surface, it is a challenge in the demolding step to smoothly take out the moldings. In this work, setting a suitable inclination on the microstructures has been tried by using moving X-ray mask process. An exposure technique to form these microstructures on polymethylmethacrylate (PMMA) plate has been developed using synchrotron radiation and a moving X-ray mask which is moved by systematical controls of a personal computer. This process needs a moving clearance between the X-ray mask and the PMMA plate to move the X-ray mask for the PMMA plate. This clearance-setting is one of the important factors to control the precise side-wall inclination avoiding an X-ray diffraction. (A nickel mold part for an injection molding is produced on the PMMA plate by an electroforming process.)
社団法人日本機械学会の論文
2007-09-07