LIGAプロセスを用いた微細形状パターン射出成形品の開発(G04-2 先進加工技術とその評価,G04 機械材料・材料加工)

概要

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The surface of a polymethylmethacrylate (PMMA) plate was irradiated by synchrotron radiation for patterning 15×15 clusters with spacing of 100 micron meter, and each cluster being constituted of 30×30 pieces of well that shaped with 10 micron meter diameter and that aligned with a pitch of 30 micron meter. By moving a x-ray mask systematically during this patterning process, micro structures having an optional side-wall inclination could be established on PMMA plate. The distance between the x-ray mask and the PMMA plate also was found to be one of the important factors for determining the side-wall inclination due to the effect of x-ray diffraction. On the basis of the patterned PMMA plate, used as a master plate, a nickel mold part was made by electro-forming process. The process proved to be effective in producing the Ni-made mold part having replicated micro-patterns with aspect ratio 1.7 (10 micron meter diameter and 17 micron meter height) on the surface. Then, the mold part was inserted in a mold base and polystyrene (PS) was injection molded to produce micro-well PS plates. By selecting suitable molding conditions, it was clarified that the PS chips with excellent transcription for patterns of the mold part without warp can be mass-produced by this method.
2004-09-04