1833 2成分混合溶液を用いたCVD新気化供給法の構築(J15-1 噴霧による混合気形成および燃焼(1),J15 噴霧による混合気形成および燃焼)

概要

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The author's previous study proposed a new evaporation supply method for liquid precursors in a chemical vapor deposition (CVD) process called flashing spray CVD (FS-CVD). In this method, the liquid precursors are supplied directly to a vacuum chamber through an injector, just like fuel for an automotive engine. This unsteady and intermittent spray with flash boiling requires no vaporizer. Further, the authors developed a way to relatively reform the saturated vapor pressure of the precursor by mixing with a lower vapor pressure organic solvent for the effective use of this method. It is easier to obtain the active flashing spray due to the higher vapor pressure of mixed material. In this paper, to improve the vaporization of Tetraethylorthosilicate (TEOS) as the precursor, n-pentane is mixed as the higher vapor pressure material. The vapor formation of flashing spray for various mixing fractions of n-pentane was observed by the image analysis of LIF and Mie scattering. The result shows that it is possible to form suitable flashing spray of two-component solution by incorporating organic solvent on effective mixing fractions.
社団法人日本機械学会の論文
2007-09-07