ボトムコンタクト型有機TFTの特性改善とそれを用いたフレキシブル液晶表示パネルの試作(<小特集>ディスプレイ-IDW/AD'05を中心に-)

概要

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We developed an organic thin-film transistor (OTFT)-driven 16×16 polymer-dispersed liquid crystal (PDLC) display panel on a flexible plastic film. We fabricated low-voltage-operation bottom-contact (BC) OTFT with Ta_2O_5 gate insulator, using photolithography method. This transistor is suitable for both scaling down and increasing the number of pixels, however its performance is inferior to that of top-contact OTFT because of contamination and defects on the surface of the insulator, and leakage-current of channel region. We have reduced the current of the OTFT by optimizing the pentacene deposition area. We used O_2 plasma, UV cleaning and HMDS as surface treatments suitable for Ta_2O_5 gate insulator, to improve the characteristics. The OTFT showed a good carrier mobility of 0.3cm^2/Vs, a high current on/off ratio of over 10^6 and a low operating drain voltage of -6V. We also successively confirmed display operation of the fabricated 16×16 PDLC display panel with a low driving voltage of 13 volts.
社団法人映像情報メディア学会の論文
2006-09-01