電流パルス駆動によるアザラシ型位置決め機構の高分解能化

概要

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The authors have proposed a driving method of a piezoelectric actuator by using current pulses for the high resolution. It was applied to the driving method of Extension device of AZARASHI(Seal) Mechanism. A device with 1 degree of freedom was designed for the improvement of the resonant frequency and resolution by using the finite element method. A piezoelectric actuator was used for a clamp of the controlled Friction device to improve the response time. The device runs along a double-V guide for the high motion accuracy. In Coarse mode, Extension device repeats the extension and contraction with its full stroke. Then, Friction device for a constant friction is positioned during fixing the controlled Friction device in Fine mode. In the case of the reference position of 100 μm, the settling time within 5nm was 376ms.
2008-04-05