TiO_2の出発原料粒径がAl_2O_3-TiO_2マイクロ波誘電体の焼成およびアニールに及ぼす影響(秋季シンポジウム若手研究者論文)

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The microwave dielectric properties of Al_2O_3-TiO_2 ceramics were studied. The large negative temperature coefficient of the resonant frequency (τ_f) of Al_2O_3 ceramics was improved by adding rutile (TiO_2), which has a large positive τ_f. In order to achieve τ_f of nearly zero, the post annealing treatment is necessary for the dense Al_2O_3-TiO_2 ceramics sintered at more than 1300℃, because Al_2TiO_5 secondary phase appears during sintering. The previous study reported that the post-annealing treatment decomposed Al_2TiO_5 into Al_2O_3 and TiO_2. However, a brief post-annealing accompanied to reduction of Qf. This study tries to make clear influence of the annealing on the decomposition and the microstructure as well as the microwave dielectric properties. Particularly, we focus on effect of starting particle sizes of TiO_2 on the annealing process. It was found that difference in the starting particle size affected both decomposition process and grain growth during annealing. In the case that the small starting particle size (0.05μm), Al_2TiO_5 phase was lightly decomposed by post annealing treatment for one time. The grains gradually grew as time of the post annealing treatment, resulting in increase of Qf. In the case of the large starting particle size (0.5μm), Al_2TiO_5 phase remained slightly by post annealing treatment for one time and the grain size maintained without grain growth. The residual Al_2TiO_5 might bring the reduction of Qf and the Qf values maintain overall by mean of no grain growth.
2007-11-01

TiO_2の出発原料粒径がAl_2O_3-TiO_2マイクロ波誘電体の焼成およびアニールに及ぼす影響(秋季シンポジウム若手研究者論文)

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