LTCC用ガラスセラミックス材料の焼結挙動に及ぼすフィラー粒径の影響

概要

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The influence of TiO2 filler particle size on sintering behavior was investigated in glass-ceramics designed for low temperature co-fired ceramics (LTCC). The composition consisted of: 0.15 volAl2O3-0.15volTiO2-0.70vol glass (Sr-Mg-Ca-Si-Al-B-O), with Al2O3 and TiO2 being used as filler. Several average particle sizes of TiO2 were used while the average sizes of the Al2O3 and the glass were kept constant. As the particle size of TiO2 decreased, the sintering temperature increased. The origin of this effect formed the basis for this investigation. The density and crystal phases of the glass ceramics were not affected by a change in the TiO2 particle size. However, a change in viscosity was observed; as the TiO2 average particle size decreased, the viscosity of the glass-ceramics increased. This effect was explained by the ability of the smaller particles to more effectively obstruct glass liquidity.
社団法人粉体粉末冶金協会の論文
2005-04-15