Hollowing and Transfer of Polymethyl Methacrylate Film Propelled by Laser Ablation of Triazeno Polymer Film : Optics and Quantum Electronics
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概要
- 論文の詳細を見る
Utilizing the laser ablation of a triazeno polymer (TA) film as a driving force, materials transfer and patterning were successfully demonstrated. The prepared overlaid films consist of a source film, which is made of pyrene-doped polymethyl methacrylate (PMMA) and TA films, and a target neat PMMA film on a quartz plate. After pressing them together, a 248nm laser pulse was irradiated from the back side of the source film. When the thickness of the TA film was 1.0μm, slightly thicker than the penetration depth of TA of 600nm, the pyrene-doped PMMA film was perfectly transferred to the target film.
- 社団法人応用物理学会の論文
- 2001-08-01
著者
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MASUHARA Hiroshi
Department of Allied Physics,Osaka University
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MITO Takashi
Department of Mental Retardation and Birth Defect Research,National Institute of Neuroscience,Nation
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Mito Takashi
Department Of Applied Physics Osaka University
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Suzuki Kenkichi
Electron Tube & Devices Division Hitachi Ltd.
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TSUJITA Takuji
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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Tsujita Takuji
Department Of Applied Physics Osaka University
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HAYASHI Nobuaki
Electron Tube & Devices Division, Hitachi Ltd.
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Hayashi Nobuaki
Electron Tube & Devices Division Hitachi Ltd.
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