Correlation of Electrical, Thermal and Structural Properties of Microcrystalline Silicon Thin Films : Semiconductors

スポンサーリンク

概要

• 論文の詳細を見る

• Thermal diffusivity (α) has been correlated with the electrical and structural properties of hydrogenated microcrystalline silicon (μc-Si:H) films. In the heterogeneous microcrystalline network, α and electrical conductivity (σ_D) maintain a one-to-one correspondence, and both these parameters are directly related to the crystalline volume fraction (F_c) of the network. For the amorphous silicon network, α is 〜 0.2 cm^2・s^<-1> and has a very low σ_D of 〜 10^<-8>S・cm^<-1>. When the crystalline volume fraction (F_c) exceeds a certain percolation threshold, both α and σ_D increase abruptly. Undoped μc-Si:H films having F_c〜94% exhibit a high magnitude of α 〜 0.80cm^2・s^<-1> and a very high σ_D of 〜 10^<-3>S・cm^<-1>.

• 社団法人応用物理学会の論文
• 2002-03-01

著者

• Chen Li

  Centre For Condensed Matter Sciences National Taiwan University

• CHEN Kuei

  Institute of Atomic and Molecular Sciences, Academia Sinica

• Chen Kuei

  Institute Of Atomic And Molecular Sciences Academia Sinica

• Das Debajyoti

  Energy Research Unit Indian Association For The Cultivation Of Science:institute Of Atomic And Molec

• Das Debajyoti

  Energy Research Unit Indian Association For The Cultivation Of Science

• JANA Madhhusudan

  Energy Research Unit, Indian Association for the Cultivation of Science

• BARUA Ashok

  Energy Research Unit, Indian Association for the Cultivation of Science

• CHATTOPADHyan Surajit

  Centre for Condensed Matter Sciences, National Taiwan University

• Jana Madhusudan

  Energy Research Unit Indian Association For The Cultivation Of Science

• Barua Ashok

  Energy Research Unit Indian Association For The Cultivation Of Science

• Jana Madhhusudan

  Energy Research Unit Indian Association For The Cultivation Of Science

• Chattopadhyan Surajit

  Centre For Condensed Matter Sciences National Taiwan University

関連論文

• Study of a Super-Resolution Optical Structure : Polycarbonate/ZnS-SiO_2/ZnO/ZnS-SiO_2/Ge_2Sb_2Te_5/ZnS-SiO_2
• Highly Conducting Undoped μc-SiO:H Films Prepared by RF Glow Discharge
• Control of Crystallization at Low Thickness in μc-Si:H Films Using Layer-by-Layer Growth Scheme
• Wide Band Gap Si:H at Low H-Content Prepared by Interrupted Grown and H-Plasma Treatment
• Correlation of Electrical, Thermal and Structural Properties of Microcrystalline Silicon Thin Films : Semiconductors
• Study of a Super-Resolution Optical Structure: Polycarbonate/ZnS–SiO2/ZnO/ZnS–SiO2/Ge2Sb2Te5/ZnS–SiO2
• Effect of Deposition Temperature on the Properties of Magnetron Sputtered Hydrogenated Amorphous Silicon Films

スポンサーリンク