Measurement of Dielectric Property by Evanescent Microwave Microscope

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概要

• 論文の詳細を見る

• Microwave dielectric properties of (Bi_<1.5>Zn_<1.0>Nb_<1.5>)O_7/MgO (BiZN/MgO) thin films were measured at 2.85 GHz by an evanescent microwave probe (EMP) technique. This is the first time that the dielectric properties of a thin film have been characterized in the microwave frequency region. The dielectric constant of the BiZN/MgO films increases with the deposition temperature, which is apparently due to the increase in crystallinity and the change in the preferred orientation of the films. High-resolution EMP measurement reveals that the films consist of ultrasmall grains about 0.4 μm in diameter. The dielectric constant (K) of BiZN/MgO films is comparable to that of the BiZN bulk materials, whereas the loss factor (tan δ) of the films is markedly larger than that of the ceramics.

• 社団法人応用物理学会の論文
• 2002-11-30

著者

• CHENG Hsiu-Fung

  Department of Physics, National Taiwan Normal University

• CHEN Yi-Chun

  Department of Food and Nutrition, Faculty of Agriculture, Kinki University

• Cheng Hsiu-fang

  Department Of Physics National Taiwan Normal University

• Cheng Hsiu-fung

  Depart. Of Physics National Taiwan Normal University R.o.c.

• Lei Chien-ming

  Materials Science Center National Tsing-hua University

• Xiang Xiao-dong

  Intematix Moraga

• Chen Yi-chun

  Department Of Family Medicine Taipei Veterans General Hospital

• Chen Yi-chun

  Department Of Physics National Taiwan Normal University

• WANG Gang

  Intematix, Moraga

• IAN I-Nan

  Materials Science Center National Tsing-Hua University

• Wang Gang

  Intematix Moraga

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