In Situ Spectroscopic Examination of Plasma Emission during Excimer Laser Deposition of Pb_<0.95>La_<0.05>(Zr_<0.7>Ti_<0.3>)_<0.9875>O_3 Thin Films

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The optical emission spectra radiated from the laser-induced PLZT plume under various levels of laser fluence and oxygen pressure were systematically examined. The plasma temperature of Ti species corresponding to each spectrum was estimated using the Boltzmann plot technique. No emission belonging to diatomic species was observed. For the Pb species, only the spectral lines from excited neutral atoms were observed. For the Ti and Zr species spectral lines from both excited neutral atoms and singly ionized ions were obtained. The intensity of the spectral lines increased with the laser fluence when the oxygen pressure (P_<_O2>) was kept constant. The plasma temperature of the Ti species varied insignificantly with the laser fluence under P_<_O2>=0.1 mbar. On the other hand, the spectral intensity markedly decreased and the plasma temperature significantly increased when P_<O2> level was reduced to below 0.01 mbar. The plasma temperature changed only moderately, when P_<_O2> increased from 0.1 mbar to 1 mbar. The crystallinity of thus obtained PLZT films varied with the oxygen pressure.
社団法人応用物理学会の論文
1995-10-15