Calibration of Non Linear Properties of Pb(Zr, Ti)O_3 Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Nam Hyo-jin
Microsystem Group Lg Electronics Institute Of Technology
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Cho Seong-moon
Microsystem Group Lg Electronics Institute Of Technology
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Hong J‐w
National Central Univ. Chung‐li Twn
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Lee Caroline
Microsystem Group Lg Electronics Institute Of Technology
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Hong Jae-wan
School Of Physics Seoul National University
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KIM Young-Sik
Microsystem Group, LG Electronics Institute of Technology
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BU long-Uk
Microsystem Group, LG Electronics Institute of Technology
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KHIM Zheong-Gu
School of Physics, Seoul National University
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Bu Long-uk
Microsystem Group Lg Electronics Institute Of Technology
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Kim Young-sik
Microsystem Group Lg Electronics Institute Of Technology
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Khim Z‐g
School Of Physics Seoul National University
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- Improvement of Current Injection of Porous Silicon
- Effects of Dielectrics on the Characteristics of Large-Area Silicon Microstrip Sensors
- Calibration of Non Linear Properties of Pb(Zr, Ti)O_3 Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy
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