Tip Effects of Piezoelectric-Mode Atomic Force Microscope for Local Piezoelectric Measurements of an SrBi_2Ta_2O_9 Thin Film

概要

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Piezoelectric-mode atomic force microscope was utilized to characterize a polycrystalline SrBi_2Ta_2O_9 thin film. It was found that a hysteresis loop can be obtained using a stiff tip with force constant of 48 N/m. On the other hand, the detected signal using a soft conducting tip with force constant of 3 N/m increases linearly with the increase of the applied dc electric field. In order to identify the types of the measured signals, we simulated a case, in which an ideal piezoelectric hysteresis loop is overlapped by a linear electrostatic signal. It was found that the coercive voltage of the electrostatic-force-coupled hysteresis loops decreases with the increase of the electrostatic signal. Furthermore, the electrostatic-force-coupled piezoresponse can not reach a saturated value. This suggests that the signal measured using the soft tip is an electrostatic predominant signal, while the signal detected using the stiff tip is a piezoelectric predominant response.
社団法人応用物理学会の論文
2002-11-30