2127 溶融微細転写法を用いた表面に微細パターンを有するディスプレイ部材・μ-TASチップの創成(S29-2 マイクロ/ナノ加工の動向と可能性(2),S29 マイクロ/ナノ加工の動向と可能性)

概要

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In this study we developed a new molding process called "Melt Replication Process" to fabricate thermoplastic products with 3-dimensional geometry, thin wall, large area, precise microstructures, high optical-transparency, low residual stress and low birefringence under very low pressure less than 10MPa. Furthermore, we demonstrated its applicability to display parts and μ-TAS (Micro-Total Analysis Systems) chips. From our experiments using COP (Cyclo-Olefin Polymer), the products with microstructures ranging from tens of nm to hundreds of μm could be fabricated with transcript ratio over 95% and with very low pressure within short cycle time. Particularly, in the case of μ-TAS chip which has pillars with 20μm in diameter and 50μm in height, high replication ratios larger than 95% could be attained. Furthermore, the homogeneous transcription of microstructures over the large surface area of the molded product was confirmed.
社団法人日本機械学会の論文
2005-09-18