Effect of Targets with Different Carbon Contents on Wear Resistance of SiC Films Deposited by RF Magnetron Sputtering(Ultra-precision machining)
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概要
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Four types of target with carbon contents of 50mol%, 55mol%, 60mol% and 67mol% were used to evaluate the characteristics of sputtered silicon carbide films as functions of the carbon content of the target. Film hardness decreases to a minimum value for the carbon content of 55mol% and then increases with a further increase in the carbon content of the target. The friction and wear tests carried out using a pin-on-disktype test machine showed that the friction coefficient of the films decreases from 0.14 in the case of using a target with a carbon content of 55mol% to 0.08 in the case of using a target with a carbon content of 67mol%, and that the wear resistance of the films increases with increasing carbon content of the target.
- 社団法人日本機械学会の論文
- 2005-10-18
著者
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Nakamura Masayoshi
Department Of Mechanical Engineering Hiroshima Kokusai Gakuin University
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Sumomogi Tsunetaka
Department Of Mechanical Engineering Hiroshima Kokusai Gakuin University
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FUJIYAMA Hirokazu
Department of Intelligent Mechanical Engineering, Fukuoka Institute of Technology
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HAMASAKI Kazumasa
Department of Intelligent Mechanical Engineering, Fukuoka Institute of Technology
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Fujiyama Hirokazu
Department Of Intelligent Mechanical Engineering Fukuoka Institute Of Technology
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Hamasaki Kazumasa
Department Of Intelligent Mechanical Engineering Fukuoka Institute Of Technology
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NAKAMURA MASAYOSHI
Department of Anatomy, Jikei University School of Medicine
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