Study of Nano-precision Synergistic Finishing Process of ELID-grinding and MRF for Glass Lens(Nanoprecision Elid-grinding (continued))
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, we proposed a complex finishing process of MRF and ELID grinding and applied this method to nano-precision finishing for glass lens. ELID grinding, as pre-finishing, was employed to obtain high form accuracy and good surface quality in high efficiency. And then, MRF, as the final finishing, was used for improve furthermore surface quality and figure accuracy. Several sets of finishing experiments for sphere glass lens have been performed to verify obtainable surface figure precision and surface finish by use of this new synergistic process. Surface accuracy of the λ/18 nm P-V and surface micro-roughness less than 10 Angstroms for spherical lens were produced in high efficiency.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Ohmori H.
Material Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
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Yin S.
The Nexsys Corporation (RIKEN VENTURE)
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Lin W.
VCAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Uehara Y.
VCAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Lin W.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
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Ohmori H.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Uehara Y.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
関連論文
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- 113 On-machine Profile Measuring System with Laser-Probe
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- Study of nano-precision synergistic finishing process of ELID-grinding and MRF for silicon mirror(Nanoprecision Elid-grinding (continued))
- Study of Nano-precision Synergistic Finishing Process of ELID-grinding and MRF for Glass Lens(Nanoprecision Elid-grinding (continued))
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- Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))
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- 205 Surface Characteristics of ELID Ground Micro-tools