Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))
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概要
- 論文の詳細を見る
The ELID-grinding R&D activities on development of large optics for astronomical observatory and semiconductor fabrication, have been accelerated in these years. The authors developed the large aspheric nanoprecision ELID-grinders such as "L-uaoe-GIC", "N-aou-VEL", etc. for those purposes. In this paper, the authors introduce the examples of ELID-ground large mirrors and the new turning grinding method with the exclusive large and indexable rotary table which was newly developed specifically for efficient fabrication of large telescope mirror segments. The developed rotary table was successfully mounted on a large aspheric ELID-grinder. A new additional finishing process method was also devised on the machine.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Watanabe Y.
V-CAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Suzuki T.
V-CAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Uehara Y.
V-CAD fabrication team, RIKEN
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Lin W.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
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Ohmori H.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Ohmori H.
V-CAD Fabrication Team, Integrated Volume-CAD System Program, Center for Intellectual Property Strat
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Uehara Y.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
関連論文
- ELID Grinding Characterization of Large Schmidt Lens for Large Telescope(Nanoprecision Elid-grinding (continued))
- Ultraprecision ELID grinding for Micro Lens Mold(Nanoprecision Elid grinding)
- 203 Surface Properties of Ceramics for Lightweight Mirrors after ELID Grinding
- 202 Ultraprecision Fabrication of Glass Ceramic Aspherical Mirror by ELID grinding Method
- 113 On-machine Profile Measuring System with Laser-Probe
- Development of Spherical Lens ELID Ggrinding System by Desk-top 4-axes Machine Tool(Nanoprecision Elid grinding)
- Study of nano-precision synergistic finishing process of ELID-grinding and MRF for silicon mirror(Nanoprecision Elid-grinding (continued))
- Study of Nano-precision Synergistic Finishing Process of ELID-grinding and MRF for Glass Lens(Nanoprecision Elid-grinding (continued))
- 204 Micro V-grooves Grinding Technique of Large Germanium Immersion Grating Element for Mid-infrared Spectrograph
- Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))
- New ELID Grinding Technique for Desk-top Grinding System Based on VCAD Concept(Nanoprecision Elid-grinding (continued))
- Development of the Micro Tool by the Desk-top ELID Grinding System(Nanoprecision Elid grinding)
- 205 Surface Characteristics of ELID Ground Micro-tools