Development of the Micro Tool by the Desk-top ELID Grinding System(Nanoprecision Elid grinding)
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概要
- 論文の詳細を見る
In this research, processing of micro tools was realized by ELID grinding. However, there was a problem in productivity, that is to say: various shaped processing time is long. Under this background, in order to target high-streamline in establishment of micro tool processing, the desk-top type cylindrical grinding machine called "CYLIN" which is equipped with the ELID system was developed. In this paper, this processing system for micro tools is introduced, and basic experiments processing micro tools of hard metal were conducted. In this experiment, using a#20000 wheel a micro tool of aspect ratio 20 was successfully produced with ELID grinding. And it was suggested that the grinding wheel rotational direction affects the obtained micro tool surface quality. And, in processing of a highaspect-ratio micro tool which was ground by two wheels at the same time, there is no size difference of a root part and a tip part changing.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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Ohmori H.
Material Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
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Watanabe Y.
V-CAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Katahira K.
Materials Fabrication Laboratory, The Institute of Physical and Chemical Research (RIKEN)
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Uehara Y.
V-CAD fabrication team, RIKEN
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Naruse T.
Materials Fabrication Laboratory, RIKEN
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Mitsuishi N.
The Nexsys Corp
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Ishikawa S.
The Nexsys Corp
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Lin W.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
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Ohmori H.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Yamamoto Y.
Tube systems Ltd
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Mitsuishi N.
The Nexsys Corp:riken Venture
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Katahira K.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Naruse T.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Uehara Y.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
関連論文
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- 113 On-machine Profile Measuring System with Laser-Probe
- Development of Spherical Lens ELID Ggrinding System by Desk-top 4-axes Machine Tool(Nanoprecision Elid grinding)
- Study of nano-precision synergistic finishing process of ELID-grinding and MRF for silicon mirror(Nanoprecision Elid-grinding (continued))
- Study of Nano-precision Synergistic Finishing Process of ELID-grinding and MRF for Glass Lens(Nanoprecision Elid-grinding (continued))
- 204 Micro V-grooves Grinding Technique of Large Germanium Immersion Grating Element for Mid-infrared Spectrograph
- Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))
- New ELID Grinding Technique for Desk-top Grinding System Based on VCAD Concept(Nanoprecision Elid-grinding (continued))
- Development of the Micro Tool by the Desk-top ELID Grinding System(Nanoprecision Elid grinding)
- 205 Surface Characteristics of ELID Ground Micro-tools