202 Ultraprecision Fabrication of Glass Ceramic Aspherical Mirror by ELID grinding Method
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概要
- 論文の詳細を見る
Glass-ceramic aspherical mirrors used as optical elements in space astronomical observatory must be machined with very high profile accuracy and surface smoothness. Precision grinding processes are very effective in fabrication of such profiles. In particular, ELID (Electrolytic In-Process Dressing) grinding method is possible to achieve ultraprecision smooth surface of hard and brittle materials. To obtain ultra smooth surface required by astronomical observatory, final polish process which required long time after conventional grinding process was necessary. ELID grinding method using an ultraprecision grinding machine tool with nano-level hydrostatic guide will be very effective in reducing the time required for finial polishing process. In this paper, a new ELID grinding system is introduced and experimental results of fabricating glass-ceramic paraboloidal mirror are discussed.
- 一般社団法人日本機械学会の論文
著者
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Ohmori H.
Material Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
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Uehara Y.
Material Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
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Makinouchi A.
Integrated V-CAD System Research Program, The Institute of Physical and Chemical Research (RIKEN)
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Makinouchi A.
Integrated V-cad System Research Program The Institute Of Physical And Chemical Research (riken)
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Watanabe Y.
V-CAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Suzuki T.
V-CAD fabrication team, The Institute of Physical and Chemical Research (RIKEN)
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Yokota H.
CANON INC
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Suzuki M.
CANON INC
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Abe T.
CANON INC
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Ohmori H.
Materials Fabrication Laboratory Riken:the Institute Of Physical And Chemical Research
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Uehara Y.
V-cad Fabrication Team Riken:the Institute Of Physical And Chemical Research
関連論文
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- 203 Surface Properties of Ceramics for Lightweight Mirrors after ELID Grinding
- 202 Ultraprecision Fabrication of Glass Ceramic Aspherical Mirror by ELID grinding Method
- 113 On-machine Profile Measuring System with Laser-Probe
- Development of Spherical Lens ELID Ggrinding System by Desk-top 4-axes Machine Tool(Nanoprecision Elid grinding)
- Study of nano-precision synergistic finishing process of ELID-grinding and MRF for silicon mirror(Nanoprecision Elid-grinding (continued))
- Study of Nano-precision Synergistic Finishing Process of ELID-grinding and MRF for Glass Lens(Nanoprecision Elid-grinding (continued))
- 204 Micro V-grooves Grinding Technique of Large Germanium Immersion Grating Element for Mid-infrared Spectrograph
- Development of Large Optics Fabrication/Finishing (LOF) Process(Nanoprecision Elid-grinding (continued))
- New ELID Grinding Technique for Desk-top Grinding System Based on VCAD Concept(Nanoprecision Elid-grinding (continued))
- Development of the Micro Tool by the Desk-top ELID Grinding System(Nanoprecision Elid grinding)
- 205 Surface Characteristics of ELID Ground Micro-tools