水平コールドウォール型CVD装置の熱流動解析 : 2次元および3次元モデルと可視化実験

概要

論文の詳細を見る
Heat transfer and gas flow characteristics in a horizontal cold-wall CVD reactor were investigated through flow visualization experiments and numerical analyses on the basis of two- and three-dimensional models. Experimental results revealed that two-dimensional flow prevails under a wide range of temperature and inlet flow rate for the Helium system, while the nitrogen system has a tendency to form a three-dimensional flow structure mainly with the longitudinal cells induced by the Benard convection. Flow patterns in the He system could be reproduced quantitatively by the numerical results of two-dimensional model. Three-dimensional model for the N_2 system represented the process of formation of longitudinal cells under high Re condition.
九州大学の論文
1995-11-15