燃焼炎法によるMo基板表面への三段階合成ダイヤモンド皮膜のはく離に及ぼす流量比の影響

概要

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Diamond films were synthesized on a Mo substrate using combustion flame. During the cooling process, most diamond films delaminated. In this study, to prevent the delamination of the interface, effects of the flow ratio (R_f=F_o/F_a) of oxygen flow rate (F_o) to acetylene flow rate (F_a) on the delamination were investigated by the experiment. The results show that most prevention of the delamination was obtained in the case of the flow ratio R_f=0.90 for synthesis. The abnormal growth of synthesized films occurred in the case of flow ratios R_f=0.75, 0.80. Synthesized films delaminated in the case of flow ratios R_f=0.95, 1.00. In order to specify the synthesized substance, SEM and XRD were used. The results show that the synthesized film was a good diamond in the case of the flow ratio R_f=0.90. It concludes that the delamination-free crystal growth can be realized at the flow ratio R_f=0.90.
社団法人日本機械学会の論文
2007-01-25