621 燃焼炎法による合成ダイヤモンド皮膜と MO 基板の界面はく離の評価

概要

論文の詳細を見る
Diamond films are synthesized on Mo substrate using combustion flame generated from the reaction of the acetylene and oxygen gases. In this case, diamond films are subjected to thermal load due to a mismatch of thermal expansion between diamond films and Mo substrate during cooling process from synthesis temperature to room temperature. Thus, the delamination between the diamond film on Mo substrate occurs due to these thermal stresses. To prevent the delamination, a three-step synthesis method is proposed. One of its advantages is that adherent diamond film on Mo substrate can be obtained by using a interlayer of first synthesis. The delamination between diamond films synthesized using the three-step synthesis method on Mo substrate is discussed.
社団法人日本機械学会の論文
2003-10-17