界面はく離を考慮した燃焼炎法によるMo基板表面へのダイヤモンド皮膜合成

概要

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Diamond films were synthesized on a Mo substrate using combustion flame. During cooling process, the most diamond films delaminated between the diamond film and the Mo substrate. It was caused by the thermal stress due to a mismatch of the thermal expansion between the diamond film and the Mo substrate. In this study, a three-step synthesis method was proposed and prevented the film from the delamination. In the first step, the Mo_2C and the diamond phases were synthesized on the Mo substrate, but the diamond phase was synthesized in the second and the third steps. The interfacial stress between the film and substrate was calculated by a finite element method. According to the results, the inter facial stress in the film made by the three-step synthesis method was smaller than that by the one-step synthesis method. The three-step method is useful for synthesizing the diamond film.
社団法人日本機械学会の論文
2005-03-25