空気式静圧案内に関する基礎的研究 : 管内表面粗さを考慮した微細オリフィス内空気流れの解析

概要

論文の詳細を見る
The purpose of this study is to enhance the calculation accuracy in the region of which the diameter of the orifice and the guidance clearance are comparatively small in the aerostatic guidance design. Specifically, the amount of air flux passing through said orifice is calculated in two separated parts, one part is the calculation done on the boundary layer flow whereas the other part on the potential flow. In this case, the calculation of the boundary layer flow is attempted using a theory in which the surface roughness is taken into account. That is, the calculation is done based on a virtual cylinder which has the same area as that of the rough inner surface of the orifice calculated based on the measured value of the surface roughness of an orifice cut surface. As a result, in the region abovementioned the calculation results of the flux, the recess pressure, the load capacitance and the static rigidity, are in a good agreement with the experimental results.
社団法人精密工学会の論文
2007-02-05