空気式静圧送りねじに関する研究(第1報) : 1リード相当部分を環状平面案内とした場合の静剛性

概要

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The purpose of this study is to offer basic design datum of aerostatic lead screws by applying the theories developed in aerostatic guiding systems to aerostatic lead screws. In this paper, using a thrust bearing type model with ring shaped plane guiding surfaces corresponding to one-lead screw flanks, pressure distribution, loading characteristic, and the maximum static rigidity are calculated theoretically, and examined experimentally. As the results, theories for calculating aforementioned design datum were confirmed to be practical. The maximum theoretical values of static rigidity were 4.8 N/μm at 11 μcm of land clearance, 11.7 N/μm at 11 μm of land clearance, and 19 N/μm at 10 μm of land clearance, in the cases of 4.8 and 16 orifices respectively, and their experimental values were 6 N/μm at 11 μm of land clearance, 11.3 N/μm at 11 μm of land clearance, and 16 N/μm at 8 μm of land clearance in the cases of 4.8 and 16 orifices respectively. The experimental values seems to show fairly good agreement with the theoretical ones. And the recommendatory range of land clearance is about 10 to 20 um in this experiment.
社団法人精密工学会の論文
1984-06-05