空気式静圧案内に関する研究 : 各種要因が自励振動の発生に及ぼす影響

概要

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The Purpose of this study is to present design datum for an aerostatic guiding system. In this paper, relations between depth of air-pocket and land clearance in the critical condition for the occurrence of self-excited vibration are calculated theoretically when source pressure, orifice radius, air-pocket radius and outer land radius are varied respectively. From one of these relations, it is confirmed that the critical land clearance for the stability depends mainly on air-pocket volume, i. e. the smaller the volume the larger the critical land clearance. According to this theory, a guiding system which has land in the air-pocket was designed. From the experiments it was confirmed that the static rigidity and the stability of the system were improved, and experimental values showed good agreement with theoretical ones.
社団法人精密工学会の論文
1983-04-05