Development of Miniaturized Thin-Film Magnetic Field Probes for On-Chip Measurement

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概要

• 論文の詳細を見る

• We developed thin-film magnetic field probes with a high spatial resolution aiming to obtain the absolute value of a high-frequency power current on an LSI chip. The spatial resolution was enhanced by miniaturizing the shielded loop coil, which is the detection part of the probe. The minimum outer size of the new coil is 50×22μm. In taking measurements with the new probe over a 60-μm-wide microstrip line used as a device under test (DUT), we found that the probe output decreases by 6 dB at a distance of 40μm. This value is less than half that of our previous probe, which was around 100μm. In taking measurements with the new probe over 5-μm-wide microstrip lines used as a DUT, we found that the new probe achieved 10-μm-class high spatial resolution. This value is comparable to the typical width of global power lines on an LSI chip, which ranges from 10μm to 100μm. We estimated the configuration of the lines on an LSI chip that would enable the new probe to achieve a spatial resolution high enough to obtain the absolute value of a high-frequency power current on an LSI chip.

• 社団法人日本磁気学会の論文
• 2006-07-01

著者

• Ohashi K.

  Fundamental and Environmental Res. Labs., NEC Corporation

• SAITO S.

  System Devices Research Laboratories, NEC Corporation

• Kuriyama T.

  School Of Biology-oriented Science And Technology Kinki Univ.

• Ando N.

  Jisso and Production Technologies Research Laboratories, NEC Corp.

• Masuda N.

  Jisso and Production Technologies Research Laboratories, NEC Corp.

• Tamaki N.

  Jisso and Production Technologies Research Laboratories, NEC Corp.

• Saito M.

  Nano Technology Research Laboratory, Waseda Univ.

• Kato K.

  Nano Technology Research Laboratory, Waseda Univ.

• Yamaguchi M.

  Graduate School of Engineering, Tohoku Univ.

• Tamaki N.

  Jisso And Production Technologies Research Laboratories Nec Corp.

• Ohashi K.

  Fundamental And Environmental Research Laboratories Nec Corp.

関連論文

• Surface Plasmon Enhancement Effect and Its Application to Near-Field Optical Recording(Optical Head and Novel Recording Methods)
• Via-Profile Controlled, Porous Low-k/ Cu DDIs with High Thermal Stability
• Development of Miniaturized Thin-Film Magnetic Field Probes for On-Chip Measurement
• High Spatial Resolution Magnetic Field Measurements Using Thin-Film Shielded Loop Coil
• Evaluation of RF Magnetic Thin Film Noise Suppressor Integrated onto an Operating LSI Chip(Selected Papers from the Fourth International Workshop on High Frequency Micromagnetic Devices and Materials(MMDM4))

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