Via-Profile Controlled, Porous Low-k/ Cu DDIs with High Thermal Stability
スポンサーリンク
概要
- 論文の詳細を見る
- 2005-09-13
著者
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Ohtake H.
System Devices Research Laboratories Nec Corporation
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SAITO S.
System Devices Research Laboratories, NEC Corporation
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TAGAMI M.
System Devices Research Laboratories, NEC Corporation
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TADA M.
System Devices Research Laboratories, NEC Corporation
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ABE M.
System Devices Research Laboratories, NEC Corporation
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FURUTAKE N.
System Devices Research Laboratories, NEC Corporation
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HAYASHI Y.
System Devices Research Laboratories, NEC Corporation
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Furutake N.
System Devices Research Laboratories Nec Corporation
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Tagami M.
System Devices Research Laboratories Nec Corporation
関連論文
- Via-Profile Controlled, Porous Low-k/ Cu DDIs with High Thermal Stability
- Development of Miniaturized Thin-Film Magnetic Field Probes for On-Chip Measurement