Evaluation of RF Magnetic Thin Film Noise Suppressor Integrated onto an Operating LSI Chip(Selected Papers from the Fourth International Workshop on High Frequency Micromagnetic Devices and Materials(MMDM4))
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概要
- 論文の詳細を見る
This paper discusses the basic performance of a soft magnetic film as the RF electromagnetic noise suppressor and its application to a LSI chip. The 1.0 μm-thick soft magnetic CoNbZr film has been integrated onto a bare LSI chip by RF sputtering method. Magnetic field above the chip has been evaluated by a planar shielded-loop probe from 1 to 2GHz. The maximum suppression observed was 37.8dB at 1.12GHz.
- 社団法人日本磁気学会の論文
- 2006-11-01
著者
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FUKUSHIMA T.
Dept. of Bioengineering and Robotics, Tohoku University
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Yamaguchi M.
Dept. Obst. And Gynec. Miyazaki Medical College.
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Masuda N.
Jisso and Production Technologies Research Laboratories, NEC Corp.
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Koya S.
Dept. Of Electrical And Communication Engineering Tohoku Univ.
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Ono H.
R&D Research Center, NEC Tokin Co.
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- Evaluation of RF Magnetic Thin Film Noise Suppressor Integrated onto an Operating LSI Chip(Selected Papers from the Fourth International Workshop on High Frequency Micromagnetic Devices and Materials(MMDM4))