薄膜熱電対内蔵型切削工具による工具すくい面温度分布の測定(機械要素,潤滑,工作,生産管理など)

概要

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An innovative cutting tool insert with built-in thin film thermocouples (TFTs) was devised for measuring temperature distribution on the tool face near the cutting edge. Minute Ni-Ni/Cr TFTs were fabricated on the rake face of an alumina tool insert using PVD and photolithography processes. A hafnium oxide film was deposited on the TFTs to insulate them electrically and finally a hard coating of titanium nitride was conducted. Three types of tool inserts with different number of TFTs were developed to investigate their performance. The electromotive force of the TFT was converted to temperature based on a calibration curve obtained experimentally, which showed the Seebeck coefficient of the TFT decreased with increasing the electric resistance of the TFT. Cutting thermometry experiment proved that the response of the developed TFTs was fast enough to measure temperature change on the tool face. Temperatures measured with TFTs showed good agreement with temperatures calculated by finite difference method.
一般社団法人日本機械学会の論文
2006-05-25