133 薄膜温度センサ内臓インテリジェント切削工具の開発(OS8 工具・ツーリング)

概要

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New type of intelligent cutting tool with built-in thin film thermocouples (TFTs) was proposed. This cutting tool has many minute temperature sensors to measure the temperature distribution on the tool rake face directly. In this study, three types of cutting tools with built-in TFTs were developed. TFTs composed of Nickel and Nickel-Chrome thin films were fabricated on the rake face of the Alumina cutting insert by DC magnetron sputtering. Then Hafnium oxide film was deposited on the TFTs to insulate electrically. Finally Titanium nitride film was coated to endure cutting situation. Appropriate temperature distributions on the tool rake face including tool-chip contact area were measured by the cutting temperature experiments.
一般社団法人日本機械学会の論文
2004-11-19