ポリカルボシランを酸素不融化処理せずに合成したアモルファスSiC膜のガス透過特性(<ゲストエディターによる特集>有機-無機変換プロセス)

概要

論文の詳細を見る
Amorphous silicon carbide (SiC) membranes with molecular sieving properties were successfully synthesized on the outer surface of a γ-alumina (γ-Al_2O_3)-coated α-alumina (α-Al_2O_3) porous support through pyrolysis of polycarbosilane without oxygen-curing process. The amorphous SiC membrane pyrolyzed at 1073K after dip coating with capillary force possessed the hydrogen (H_2) permeance of 8.1×10^<-7>mol・m^<-2>・s^<-1>・Pa^<-1> and the H_2/carbon dioxide (CO_2) permselectivity of 13 at 873K. On the other hand, the amorphous SiC membrane pyrolyzed at 1073K a total of four times after dip coating without capillary force possessed a helium (He) permeance of 2.4×lO^<-7>mol・m^<-2>・s^<-1>・Pa^<-1>, a He/H_2 permselectivity of 1.9 and a He/CO_2 permselectivity of 19 and at 873K. Gas permeance properties were depended on coating method, densification of the Si-C network by heat history and film thickness.
社団法人日本セラミックス協会の論文
2006-06-01