ポリチタナシラザンから合成したチタン添加アモルファス窒化ケイ素からのα-Si_3N_4の低温結晶化挙動(<ゲストエディターによる特集>有機-無機変換プロセス)

概要

論文の詳細を見る
Polytitanasilazanes with Ti/Si ratios ranging from 0.001 to 0.1 were synthesized by chemical modification of commercially available perhydropolysilazane (PHPS) with Ti (N (CH_3)_2)_4. Amorphous Si-Ti-N ceramics were synthesized by pyrolysis of the polytitanasilazanes in Ar. The results of XRD analysis showed that the crystallization of a-Si_3N_4 from the Si-Ti-N materials with the Ti/Si ratios ranging from 0.001 to 0.01 started at 1273K. This crystallization temperature was 200K lower than that of the PHPS-derived Ti-free amorphous Si-N material. FT-IR and ^<29>Si MAS NMR spectroscopic analyses revealed that, during the polymer/ceramics conversion process, the dehydrogenation reactions of the PHPS were apparently accelerated by the small amount of Ti-doping using Ti(N (CH_3)_2)_4. This could lead to enhancing the lower temperature formation of SiN_4 tetrahedral units necessary for the crystallization of α-Si_3N_4 at 1273K.
社団法人日本セラミックス協会の論文
2006-06-01