バレルスパッタリング法による複雑な形状をもつ製品体への表面コーティング

概要

論文の詳細を見る
Surface coating of bolts and nuts, both of which possess complicated structures, has been successfully carried out by using a barrel-sputtering system. The formed Au film showed good adhesion in a scotch tape test and under the condition of ultrasonic treatment. No pin-hole was observed in examination by SEM which revealed that the surface of the Au film was very smooth, and that the surface configuration of a Au-coated bolt was very similar to that of a bare one. The SEM measurement of the cross-sectional area of a Au-coated nut showed homogeneous coating with a uniform film thickness on not only the external surface but also the screw thread which is in hindered surface. These results indicate that the barrel-sputtering system can be utilized as an alternative to electro- and electroless plating for homogeneous surface coating.
富山大学の論文