エアワッシャによる外気中汚染物質の除去性能の実態調査 : NH_4^+を中心にした除去機構とエアワッシャ運転方法の検討

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In this paper we describe an investigation of removal efficiency for airborne molecular contaminants by air washer installed in outdoor air conditioning unit at an actual semiconductor manufacturing facilities for 15 months. Soluble inorganic and organic compounds in outdoor air were reduced by gas absorption with air washer. The particles contained metal compounds were also reduced. In addition to air washer, gas absorption in condensate on surface of cooling coil which installed after air washer is efficient in summer. NH_4^+ concentration in the outlet air from the outdoor air conditioning unit kept less than 2 μg/m^3 for 15 months with air washer and cooling coil. NH_4^+ absorption efficiency to supply water of air washer increased when the supply water quality changed to deionized water from potable water.
2001-04-30